Product features:
The brand new voltage regulating amplifier circuit design reduces transistor heating and increases equipment reliability.
Unique signal lock-in design can eliminate "beat frequency" and generate stable plasma when multiple power supplies are working in a vacuum chamber.
The unique pulse modulation circuit allows the device to operate in both continuous wave and pulse modulation signal modes.
Good human-machine interface, integrating control functions of RF power supply and matching device, making operation more intuitive and convenient.
Control methods include: local, analog RS232\485， Facilitate system integration for users.
 

Main technical parameters:
Output power: 1-100% continuously adjustable, output frequency: 13.56MHz
Frequency stability: ≤ ± 0.005%, power stability: ≤ ±0.5%
● withstand standing wave ratio: VSWR≤2.0， Noise output: below -40dBc
Harmonic output: Second harmonic below -40dBc, third and higher harmonics below -45dBc
● Environmental temperature: 0-45 ℃ (non condensing), relative humidity: ＜ 85%
● Panel LCD display, 200-240V AC power supply